Semiconductor

Aggressive Semiconductor Processsing Environments

The continued demand for more powerful communications tools from PCs to digital cellular phones has led DuPont to respond with the broadest range of specialty elastomers designed specifically for the semiconductor industry. This began with DuPont™ Viton® fluoroelastomers, the standard for high performance sealing, and has now reached new standards with DuPont™ Kalrez® perfluoroelastomer parts for reduced contamination and longer seal life in aggressive wafer manufacturing environments.

The success of Kalrez® has been field-proven in the manufacture of semiconductors, where processing steps can involve extremes of both thermal and chemical exposure. Since purity is critical to high semiconductor wafer yield, reducing contamination from particulates, outgassing and extractables caused by seal deterioration is a major goal of semiconductor fabricators. With Kalrez® parts, manufacturers gain seal integrity and process purity that is backed by more than a quarter century of success.

Chemical resistance that is nearly universal, coupled with superior high-temperature properties, enables Kalrez® parts to withstand virtually any process media, including plasma with various gases at temperatures up to 325°C (617°F).

By selecting the Kalrez® product that is best suited to a specific application, processors can improve seal performance in all wafer-fabricating operations including thermal, deposition, etching, ashing/stripping, and wet chemical processes. Click on our semiconductor brochure at right for more information.

+++ Suggested Product
+ Application Dependent - Consult your DPE Representative regarding appropriate product selection

Users of Kalrez® have the assurance of quality and traceability of all parts made at the company's ISO 9001/9002 and AS 9100-registered facilities in the U.S. and Japan. No other high performance seal manufacturer offers this total control over product quality and end-use applications.