Technical paper at the 5th SMET Advanced PV Technology Conference at Intersolar - ICM, Munich - May 27, 2009 - 4.30 p.m. - Session I

Perfluoroelastomer and fluoroelastomers seals for photovoltaic cell manufacturing processes

Authors: Dr. Michele Vigliotti (presenter), Dr. Shuhong Wang, Dr. Joe Chen and John M. Legare.

Dr. Michele Vigliotti presents the advantages of using better sealing solutions in order to increase PV cell manufacturing uptime.

The paper provides application guidelines for the selection of sealing materials to help stabilize and increase equipment uptime in aggressive PV cell manufacturing processes requiring:

• Resistance to "wet" process chemistry including wafer surface texturing and P-silicate removal,
• Thermal resistance including doping for n-type layer formation (bulk c-Si) and diffusion for Di-Selenide Thermal Implantation (CGIS),
• Resistance to "dry" process chemistry including TCS-based Thermal CVD for Poly-Silicon Feedstock Production, ZnOx reactive sputtering front contacts and Fluorine-based Plasma for PECVD chamber cleaning (ARC and u-Si layer deposition).

A relative comparison of the various types of perfluoroelastomers as well as a comparison to other elastomeric materials is also discussed.

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Author/Speaker biographies