From low erosion and ultra-low particle generation to excellent compression set resistance and thermal stability, Kalrez® 9100 parts are proof positive that seals have evolved to a higher level. Specifically designed for harsh plasma environments, Kalrez® 9100 parts extend seal life, lower cost-of-ownership, and optimize equipment performance.

This edition of Semiconductor News contains synopses of case reports from semiconductor end-users detailing the superior performance of DuPont Performance Elastomers Kalrez® perfluoroelastomer parts and its latest product, Kalrez® 9100, in the toughest process environments.

To view over 50 case reports where Kalrez® perfluoroelastomer parts extend seal life, lower cost-of-ownership and optimize performance of semiconductor equipment, please visit www.kalrez.com/successstories.On the site you'll find detailed case studies for these tools:

• Applied Materials®: Black Diamond®, Ultima, Ultima Plus, Producer® and more.
• Axcelis®
• Lam Research®
• Mattson
• Novellus®: SPEED, SEQUEL and more
• Tokyo Electron®

See us at Semicon West, Booth #1807.

 In this issue . . .

Spansion Curtails Particle Contamination

IMEC Reduces Seal Replacement Costs

Qimonda Extends Seal Life

More Kalrez® Success Stories

 Previous Issues

June 2007 Issue

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Case Report #5903

Problem: Particle contamination and leaks from seal erosion

Equipment: Novellus® Concept Two® SPEED

Process: HDPCVD, STI, and IMD

Process chemistry: SiH₄, O₂ , He, and NF₃ and O₂ plasma for cleaning

Customer comment:
"O-rings should not be the limiting factor for bringing a tool down for preventative maintenance. The challenge is to increase availability while reducing the total cost of ownership. Kalrez® 9100 parts performance is responsible for up to 6x improvement in availability." - Roger Sorum, Equipment Engineer, Spansion

IMEC Reduces Seal Replacement Costs; Extends PM Cycle

Case Report #6441

Problem: Seal degradation from roughing isovalve poppet seal

Equipment:Applied Materials® Centura® Ultima

Process:HDPCVD STI and IMD

Process chemistry:SiH₄, O₂ , He, and NF₃ plasma for cleaning

Customer comment :
"At 5,000 wafer cycles, we always saw damage with the incumbent FFKM O-rings, but with Kalrez® 9100 parts, we are seeing O-rings that are like new. It's the first time we are seeing something like this, and the best we have seen to date in these positions." - Kristof Coose, Hardware Support Engineer, IMEC Silicon Process and Device Technology Division

Final Result:
IMEC adopted Kalrez® 9100 for this application and in other seal locations.

Qimonda Extends Seal Life and PM

Case Report #8255

Problem: Lid seal sticking and leaking; white powdery build-up on EOP window

Equipment: Tokyo Electron® Unity II

Process Chemistry:O₂ , NF₃ , HBr, SiF₄ , and NF₃ plasma for cleaning.

Components:Lid Seal, Upper EOP window

Customer comment :
"Our goal was a reduced cost-of-ownership by extending our PMs on the seals. We went from between 800 to 1200 RF hours with the previous seal material to over 4500 RF hours with Kalrez® 9100. We've seen minimal seal erosion and particle generation, and the sticking, leaking and build-up issues have vanished. We're now doing testing to determine the maximum practical life of the seal." - Rick Fowler, Equipment Engineering Technician

Final Result:
Kalrez® 9100 now specified for 11 different seals in the DTE chamber seal kit and under consideration in 4 other locations.